000 00457nam a2200181Ia 4500
008 200428s9999||||xx |||||||||||||| ||und||
020 _a9814-12-694-2
_c332.25
040 _aMAIN
041 _aEnglish
082 _a621.395
_bGHA
100 _aGhandhi, Sorab K.
245 _aVlsi fabrication principles: silicon & gallium arsenide
250 _a2nd ed.
260 _bJohn Wiley & sons
_c2004
300 _axxiv,
650 _aELECTRONICS
942 _cGB
999 _c5126
_d5126