Ghandhi, Sorab K. <br/><br/>
Vlsi fabrication principles: silicon & gallium arsenide 

 - 2nd ed. 
 -  John Wiley & sons  2004 
 - xxiv, 
<br/><br/><label>ISBN: </label>9814-12-694-2  332.25 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.395  / GHA